Bulk image formation of scalar modeling in a photoresist
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Sang-Kon | - |
dc.contributor.author | Oh, Hye-Keun | - |
dc.date.accessioned | 2021-06-24T00:46:14Z | - |
dc.date.available | 2021-06-24T00:46:14Z | - |
dc.date.issued | 2002-10 | - |
dc.identifier.issn | 0374-4884 | - |
dc.identifier.issn | 1976-8524 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/46783 | - |
dc.description.abstract | Most people consider bulk images of chemically amplified resists (CAR) are to be the same as those of non-CAR. However, the physical, the chemical, and the optical behaviors of CAR are different from those of non-CAR. In this study, the intensity and the acid distributions for CAR, and non-CAR are simulated and compared by using the vertical propagation model, the standard model (or the defocus model), the second-order correction model, and the full scalar model. To discuss and analyze the intensity and the acid distributions, we calculate aerial images of the projection lens systems by using scalar diffraction theory. We find that because of the different models and changes in the simulation parameters, the standing wave effects of CAB, and non-CAR behave differently. The simulation results show good agreement with the result's of a commercial tool. | - |
dc.format.extent | 5 | - |
dc.language | 영어 | - |
dc.language.iso | ENG | - |
dc.publisher | 한국물리학회 | - |
dc.title | Bulk image formation of scalar modeling in a photoresist | - |
dc.type | Article | - |
dc.publisher.location | 대한민국 | - |
dc.identifier.scopusid | 2-s2.0-0035981403 | - |
dc.identifier.wosid | 000178620000009 | - |
dc.identifier.bibliographicCitation | Journal of the Korean Physical Society, v.41, no.4, pp 456 - 460 | - |
dc.citation.title | Journal of the Korean Physical Society | - |
dc.citation.volume | 41 | - |
dc.citation.number | 4 | - |
dc.citation.startPage | 456 | - |
dc.citation.endPage | 460 | - |
dc.type.docType | Article; Proceedings Paper | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.description.journalRegisteredClass | kci | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Multidisciplinary | - |
dc.subject.keywordPlus | PARAMETER | - |
dc.subject.keywordPlus | SIMULATION | - |
dc.subject.keywordAuthor | aerial image | - |
dc.subject.keywordAuthor | projection lens system | - |
dc.subject.keywordAuthor | bulk image | - |
dc.subject.keywordAuthor | scalar model | - |
dc.subject.keywordAuthor | vertical propagation | - |
dc.subject.keywordAuthor | defocus model | - |
dc.subject.keywordAuthor | acid distribution | - |
dc.subject.keywordAuthor | CAR | - |
dc.identifier.url | https://www.jkps.or.kr/journal/download_pdf.php?spage=456&volume=41&number=4 | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
55 Hanyangdeahak-ro, Sangnok-gu, Ansan, Gyeonggi-do, 15588, Korea+82-31-400-4269 sweetbrain@hanyang.ac.kr
COPYRIGHT © 2021 HANYANG UNIVERSITY. ALL RIGHTS RESERVED.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.