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Development of micro-spot spectroscopic ellipsometer using reflective objectives
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안일신 | - |
| dc.contributor.author | Park, Geonu | - |
| dc.contributor.author | Park, Sungmo | - |
| dc.date.accessioned | 2021-06-22T13:24:33Z | - |
| dc.date.available | 2021-06-22T13:24:33Z | - |
| dc.date.created | 2021-02-18 | - |
| dc.date.issued | 2017-10 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/8605 | - |
| dc.description.abstract | We developed a micro-spot spectroscopic ellipsometer using reflective objective, which has twomirrored Schwarzschild configuration. Using only small portion of numerical aperture and selecting off-axis illumination, we achieved spotsize of 60 micrometer in diameter. As the object is composed of mirrors, chromatic abberation was not a concern but reflection from mirrors caused polarization errors. We show details of the system including the effects of polarization errors. | - |
| dc.publisher | Society for Semiconductor Devices (SSD) | - |
| dc.title | Development of micro-spot spectroscopic ellipsometer using reflective objectives | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | 안일신 | - |
| dc.identifier.doi | 10.5958/2454-762X.2017.00022.1 | - |
| dc.identifier.bibliographicCitation | Invertis Journal of Science and Technology, v.10, no.3, pp.142 - 147 | - |
| dc.relation.isPartOf | Invertis Journal of Science and Technology | - |
| dc.citation.title | Invertis Journal of Science and Technology | - |
| dc.citation.volume | 10 | - |
| dc.citation.number | 3 | - |
| dc.citation.startPage | 142 | - |
| dc.citation.endPage | 147 | - |
| dc.type.rims | ART | - |
| dc.description.journalClass | 3 | - |
| dc.description.isOpenAccess | N | - |
| dc.subject.keywordAuthor | Spectroscopic | - |
| dc.subject.keywordAuthor | ellipsometer | - |
| dc.subject.keywordAuthor | micro-spot | - |
| dc.subject.keywordAuthor | reflective | - |
| dc.subject.keywordAuthor | objective | - |
| dc.identifier.url | https://www.indianjournals.com/ijor.aspx?target=ijor:ijst1&volume=10&issue=3&article=006 | - |
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