Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Thermo-optical optimization of extreme-ultraviolet pellicles for future generations
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Park, Eun-Sang | - |
| dc.contributor.author | Ban, Chung-Hyun | - |
| dc.contributor.author | Park, Jae-Hun | - |
| dc.contributor.author | Oh, Hye-Keun | - |
| dc.date.accessioned | 2021-06-22T13:41:26Z | - |
| dc.date.available | 2021-06-22T13:41:26Z | - |
| dc.date.created | 2021-01-21 | - |
| dc.date.issued | 2017-10 | - |
| dc.identifier.issn | 1932-5150 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/8931 | - |
| dc.description.abstract | The thermo-optical optimization of extreme-ultraviolet pellicles for 3 nm node or smaller is described. Various material and multilayer structure candidates for the optimized pellicles are simulated using a finite element method. The result shows that a silicon-cored pellicle has relatively high transmission, whereas a graphene-cored pellicle shows relatively low stress compared with its material tensile strength. (c) 2017 Society of Photo-Optical Instrumentation Engineers (SPIE) | - |
| dc.language | 영어 | - |
| dc.language.iso | en | - |
| dc.publisher | SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS | - |
| dc.title | Thermo-optical optimization of extreme-ultraviolet pellicles for future generations | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | Oh, Hye-Keun | - |
| dc.identifier.doi | 10.1117/1.JMM.16.4.041014 | - |
| dc.identifier.scopusid | 2-s2.0-85040315452 | - |
| dc.identifier.wosid | 000426123600002 | - |
| dc.identifier.bibliographicCitation | JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, v.16, no.4 | - |
| dc.relation.isPartOf | JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS | - |
| dc.citation.title | JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS | - |
| dc.citation.volume | 16 | - |
| dc.citation.number | 4 | - |
| dc.type.rims | ART | - |
| dc.type.docType | Article | - |
| dc.description.journalClass | 1 | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Engineering | - |
| dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
| dc.relation.journalResearchArea | Materials Science | - |
| dc.relation.journalResearchArea | Optics | - |
| dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
| dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
| dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
| dc.relation.journalWebOfScienceCategory | Optics | - |
| dc.subject.keywordPlus | LITHOGRAPHY | - |
| dc.subject.keywordAuthor | pellicle | - |
| dc.subject.keywordAuthor | extreme ultraviolet | - |
| dc.subject.keywordAuthor | stress | - |
| dc.subject.keywordAuthor | film | - |
| dc.subject.keywordAuthor | finite element method | - |
| dc.identifier.url | https://www.spiedigitallibrary.org/journals/journal-of-micro-nanolithography-mems-and-moems/volume-16/issue-4/041014/Thermo-optical-optimization-of-extreme-ultraviolet-pellicles-for-future-generations/10.1117/1.JMM.16.4.041014.short?SSO=1 | - |
- Files in This Item
- Go to Link
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.