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Thermo-mechanical behavior analysis of extreme-ultraviolet pellicle cooling by H2 flow
- Authors
- 오혜근
- Issue Date
- 13-Sep-2017
- Publisher
- SPIE
- Citation
- International Conference on Extreme UltraViolet Lithography
- Conference Name
- International Conference on Extreme UltraViolet Lithography
- Place
- Montery, CA, USA
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