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극자외선 노광에 의한 마스크의 열적, 구조적 변화
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 오혜근 | - |
| dc.date.accessioned | 2021-06-22T14:06:12Z | - |
| dc.date.available | 2021-06-22T14:06:12Z | - |
| dc.date.created | 2020-12-17 | - |
| dc.date.issued | 2017-07-12 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/9699 | - |
| dc.publisher | Optical Society of Korea | - |
| dc.title | 극자외선 노광에 의한 마스크의 열적, 구조적 변화 | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 오혜근 | - |
| dc.identifier.bibliographicCitation | Conference of the Next Generation Lithography | - |
| dc.relation.isPartOf | Conference of the Next Generation Lithography | - |
| dc.citation.title | Conference of the Next Generation Lithography | - |
| dc.citation.conferencePlace | Bexco | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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