IEEE Transactions on Semiconductor Manufacturing
Journal Title
- IEEE Transactions on Semiconductor Manufacturing
ISSN
- E 1558-2345 | P 0894-6507 | 0894-6507 | 1558-2345
Publisher
- Institute of Electrical and Electronics Engineers
- IEEE
Listed on(Coverage)
| JCR | 1997-2019 |
|---|---|
| SJR | 1999-2019 |
| CiteScore | 2011-2019 |
| SCI | 2010-2019 |
| SCIE | 2010-2021 |
| CC | 2016-2021 |
| SCOPUS | 2017-2020 |
Active
- Active
based on the information
- SCOPUS:2020-10
Country
- USA
Aime & Scopes
- The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components, especially very large scale integrated circuits (VLSI). Manufacturing these products requires precision micropatterning, precise control of materials properties, ultraclean work environments, and complex interactions of chemical, physical, electrical and mechanical processes.