Kim, Guk-Jin; Kim, In-Seon; Lee, Sung-Gyu; Yeung, Michael; Kim, Min-Su; Park, Jin-Goo; Oh, Hye-Keun
ArticleIssue Date2017CitationJournal of Micro/ Nanolithography, MEMS, and MOEMS, v.16, no.4PublisherSPIE - International Society for Optical Engineering