ScholarWorks@Hanyang University ERICA Campus: Journal : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Journal Title

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

ISSN

E 2166-2746 | P 1071-1023

Publisher

American Institute of Physics

Listed on(Coverage)

JCR	1997-2019
SCI	2010-2019
SCIE	2010-2021
CC	2016-2021
SCOPUS	2017-2020

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Inactive

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Article List

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SCIESCOPUS

Comparison imaging ellipsometry and its application to crystallization of indium oxide thin films Go to Link

Park, Sungmo; Lee, Jungtae; Kim, Hyunjin; Kim, Jaekyun; Kim, Suenne; An, Ilsin

ArticleIssue Date2019CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.37, no.6PublisherA V S AMER INST PHYSICS

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