ScholarWorks@Hanyang University ERICA Campus: Journal : Semiconductor International

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Semiconductor International

Journal Title

Semiconductor International

ISSN

P 0163-3767 | 0163-3767

Publisher

Reed Business
Elsevier

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SJR	1999-2013
SCOPUS	2017-2020

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SCOPUS

Cu post-CMP cleaning and the effect of additives Go to Link

Park, Jin Goo; Busnaina, Ahmed

ArticleIssue Date2005CitationSemiconductor International, v.28, no.9, pp.39 - 44PublisherReed Business

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