Kang, Young-Jae; Kang, Bong-Kyun; Kim, In-Kwon; Park, Jin-Goo; Hong, Yi-Koan; Han, Sang Yeob; Yun, Seong-Kyu; Yoon, Bo-Un; Hong, Chang-Ki
ArticleIssue Date2007CitationADVANCES AND CHALLENGES IN CHEMICAL MECHANICAL PLANARIZATION, v.991, pp.275 - 280PublisherMATERIALS RESEARCH SOC