Lim, Kitaek; Bae, Yuna; Kim, Kihwan; Jeon, Sungho; Kim, Byung Hyo; Park, Jungwon; Lee, Won Chul
ArticleIssue Date2019CitationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp.105 - 106PublisherInstitute of Electrical and Electronics Engineers Inc.