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Results 1-6 of 6 (Search time: 0.002 seconds).
Simulation of mask buffer and absorber performance in extreme ultraviolet lithography
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 춘계학술대회
Publisher
한국물리학회
Place
성대
염소를 포함한 용매에서의 자외선 조사에 의한 금속박막 식각
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 춘계학술대회
Publisher
한국물리학회
Place
성대
157 nm 엑시머 레이저를 이용한 초미세 패턴 구현의 공정 변수 추출
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 춘계학술대회
Publisher
한국물리학회
Place
성대
Resolution Improvement by 193 nm Immersion Interference Lithography
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 춘계학술대회
Publisher
한국물리학회
Place
성대
157 nm F2 엑시머 레이저를 이용한 간섭 패턴 구현
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 춘계학술대회
Publisher
한국물리학회
Place
성대
반도체 공정을 위한 광리소그래피 전산모사
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 춘계학술대회
Publisher
한국물리학회
Place
성대
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