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Contact Hole 패턴에 대한 Thermal Flow 전산모사
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 추계학술대회
Publisher
2004 년도 한국물리학회 추계학술대회
Place
제주
Simulation of mask buffer and absorber performance in extreme ultraviolet lithography
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 춘계학술대회
Publisher
한국물리학회
Place
성대
Pattern size dependence on partial coherence and incident angle with 157 nm Lloyd`s mirror type interference illumination
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 추계학술대회
Publisher
한국물리학회
Place
제주
Numerical investigation of defect printability in extreme ultraviolet (EUV) reflector: Ru/Mo/Si multilayer system
오혜근
Conference
Issue Date
2004
Citation
Microprocesses and Nanotechnology Conference 2004
Publisher
일본 응용물리학회
Place
Osaka, Japan
The Search For Optimum Extreme Ultraviolet Mask In Terms Of Reducing The Absorber Shadow Effects
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 추계학술대회
Publisher
한국물리학회
Place
제주
염소를 포함한 용매에서의 자외선 조사에 의한 금속박막 식각
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 춘계학술대회
Publisher
한국물리학회
Place
성대
157 nm 엑시머 레이저를 이용한 초미세 패턴 구현의 공정 변수 추출
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 춘계학술대회
Publisher
한국물리학회
Place
성대
Experimental Comparison Among Different Polarizations With a Simple 193 nm Interference Illumination System
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 추계학술대회
Publisher
한국물리학회
Place
제주
Resolution Improvement by 193 nm Immersion Interference Lithography
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 춘계학술대회
Publisher
한국물리학회
Place
성대
Mask Structure Optimization for Shadow Effect Reduction in Extreme Ultraviolet? Lithography
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 추계학술대회
Publisher
한국물리학회
Place
제주
1
2
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Author
Park, Seung-Wook
4
AN, IL SIN
3
Kim, Jong-Hoi
2
Kim, Sang-Kon
2
Kwon, Yeong-Keun
2
Yoo, Myoung-Sul
2
Ahn, Jinho
1
Cha, Byung-Cheol
1
Choi, Jung-Wook
1
Chung, Yong-Chae
1
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Subject
EUV mask
3
chemically amplified resist
2
Computer simulation
2
EUV lithography
2
lithography
2
Photolithography
2
absorber
1
Aerial image
1
aerial image
1
Aerial images
1
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Type
Conference
18
Article
8
Language
ENG
8
Journal Index
scie
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scopus
8
kci
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