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Optimum dose variation caused by post exposure bake temperature difference inside photoresist over different sublayers and thickness
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Kang, Young-Min; An, Ilsin; Kim, Do Wan; Oh, Hye-Keun
Article
Issue Date
2008
Citation
Proceedings of SPIE - The International Society for Optical Engineering, v.6924, pp 1 - 11
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OH, HYE KEUN
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Kang, Young-Min
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Kim, Do Wan
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(100) silicon
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(e ,3e) process
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acid diffusion
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Analytic methods
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Anti-reflection coating (ARC)
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Cavity resonators
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Chemically amplified resist
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Chemically Amplified Resist (CAR)
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Cladding (coating)
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De-protection
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