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Proximity-Scan ALD (PS-ALD) 에 의한 Al₂O₃와 HfO₂ 박막증착 기술 및 박막의 전기적 특성
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권영수; 이미영; 오재응
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2008
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한국재료학회지, v.18, no.3, pp.345 - 358
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한국재료학회
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권영수
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ALD
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Al₂O₃
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gate dielectrics
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HfO₂
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high productivity.
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