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Effect of electrode heating on the distribution of the ion production rate in a capacitively coupled plasma deposition reactor in consideration of thermal decomposition
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Kim, Ho Jun
Article
Issue Date
2021
Citation
Vacuum, v.189, pp 1 - 18
Publisher
Pergamon Press Ltd.
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Kim, Ho Jun
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A-SI-H
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C-H
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DIFFUSION
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Fluid simulation
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Hydrogenated amorphous silicon
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LOW-PRESSURE
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Non-isothermal wall conditions
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Plasma enhanced chemical vapor de...
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