Characteristics of Ga-Al Doped Zinc Oxide Thin Films Deposited by Facing Targets Sputtering
DC Field | Value | Language |
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dc.contributor.author | Lee, Jin Seon | - |
dc.contributor.author | Jung, Yu Sup | - |
dc.contributor.author | Bark, Chung Wung | - |
dc.contributor.author | Kim, Kyung Hwan | - |
dc.date.available | 2020-02-28T16:43:05Z | - |
dc.date.created | 2020-02-06 | - |
dc.date.issued | 2014-09-02 | - |
dc.identifier.issn | 1542-1406 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/12294 | - |
dc.description.abstract | Gallium-aluminum doped zinc oxide (GAZO) thin film is evaluated as an alternative to ITO for use as transparent electrodes for display devices. GAZO transparent conducting thin films were deposited using a facing targets sputtering (FTS) system with a hetero-targets. The FTS system can generate high plasma density, suppress the bombardment of high-energy particles to the substrate, and reduce the working pressure and substrate temperature. The average transmittance achieved with these films was as high as 80% in the visible range. Using a working pressure of 0.4 Pa, the lowest resistivity achieved with the deposited film was 5.342 x 10(-4) omega center dot cm. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | TAYLOR & FRANCIS LTD | - |
dc.relation.isPartOf | MOLECULAR CRYSTALS AND LIQUID CRYSTALS | - |
dc.subject | TRANSPARENT CONDUCTING OXIDES | - |
dc.subject | THICKNESS DEPENDENCE | - |
dc.subject | ZNO FILMS | - |
dc.subject | TEMPERATURE | - |
dc.subject | SYSTEM | - |
dc.title | Characteristics of Ga-Al Doped Zinc Oxide Thin Films Deposited by Facing Targets Sputtering | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.description.journalClass | 1 | - |
dc.identifier.wosid | 000345074100009 | - |
dc.identifier.doi | 10.1080/15421406.2014.936772 | - |
dc.identifier.bibliographicCitation | MOLECULAR CRYSTALS AND LIQUID CRYSTALS, v.600, no.1, pp.56 - 62 | - |
dc.identifier.scopusid | 2-s2.0-84945187166 | - |
dc.citation.endPage | 62 | - |
dc.citation.startPage | 56 | - |
dc.citation.title | MOLECULAR CRYSTALS AND LIQUID CRYSTALS | - |
dc.citation.volume | 600 | - |
dc.citation.number | 1 | - |
dc.contributor.affiliatedAuthor | Lee, Jin Seon | - |
dc.contributor.affiliatedAuthor | Jung, Yu Sup | - |
dc.contributor.affiliatedAuthor | Bark, Chung Wung | - |
dc.contributor.affiliatedAuthor | Kim, Kyung Hwan | - |
dc.type.docType | Article | - |
dc.subject.keywordAuthor | thin film | - |
dc.subject.keywordAuthor | GAZO | - |
dc.subject.keywordAuthor | facing target sputtering | - |
dc.subject.keywordAuthor | transparent electrode | - |
dc.subject.keywordAuthor | working pressure | - |
dc.subject.keywordPlus | TRANSPARENT CONDUCTING OXIDES | - |
dc.subject.keywordPlus | THICKNESS DEPENDENCE | - |
dc.subject.keywordPlus | ZNO FILMS | - |
dc.subject.keywordPlus | TEMPERATURE | - |
dc.subject.keywordPlus | SYSTEM | - |
dc.relation.journalResearchArea | Chemistry | - |
dc.relation.journalResearchArea | Crystallography | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Crystallography | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
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