대향 타겟식 스퍼티링법을 이용한 저저항 투명전도 다층박막의 제작Preparation of low resistivity Transparent Conductive multilayer thin films by The Facing Targets Sputtering
- Other Titles
- Preparation of low resistivity Transparent Conductive multilayer thin films by The Facing Targets Sputtering
- Authors
- 김상모; 박용서
- Issue Date
- 2014
- Publisher
- 한국반도체디스플레이기술학회
- Keywords
- ITO; Ag; multilayer thin films; FTS
- Citation
- 반도체디스플레이기술학회지, v.13, no.2, pp.13 - 16
- Journal Title
- 반도체디스플레이기술학회지
- Volume
- 13
- Number
- 2
- Start Page
- 13
- End Page
- 16
- URI
- https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/13648
- ISSN
- 1738-2270
- Abstract
- We prepared the ITO/Ag multilayer thin films on soda-lime glass substrate by the Facing Target Sputtering System (FTS) at room temperature. To confirm the effect of Ag layer in ITO/Ag multilayer thin films, we have prepared various range of Ag layer in its thickness and investigated prior to the setting of ITO/Ag multilayer thin films. The thickness of Ag layer was controlled by the sputtering deposition time. Properties of as-prepared samples were investigated by using a four-point probe, UV-Visual spectrometer with a spectral visual range (400-800nm) and X-ray diffractometer (XRD). As a result, the transmittance of as-prepared samples turned out to be very low in the visible range due to light-scattering on the surface of thin film as the thickness of Ag layer got increased. However, reduction of phenomenon of light-reflection in visual range was observed around 20nm of Ag thickness. We prepared the ITO/Ag multilayer thin film with a resistivity of about 8×10-5 [Ω-cm] and a transmittance of more than 80 % at 550 nm.
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Collections - IT융합대학 > 전기공학과 > 1. Journal Articles
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