Improved Performance of Pentacene Thin-Film Transistors with Al2O3 Gate Dielectric: Annealing Effect on the Surface Properties
DC Field | Value | Language |
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dc.contributor.author | Hyung, Gun Woo | - |
dc.contributor.author | Park, Jaehoon | - |
dc.contributor.author | Koo, Ja-Ryong | - |
dc.contributor.author | Li, Zhao-Hui | - |
dc.contributor.author | Kwon, Sang Jik | - |
dc.contributor.author | Cho, Eou-Sik | - |
dc.contributor.author | Kim, Young Kwan | - |
dc.date.available | 2020-02-29T06:45:54Z | - |
dc.date.created | 2020-02-05 | - |
dc.date.issued | 2012-02 | - |
dc.identifier.issn | 0021-4922 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/16589 | - |
dc.description.abstract | We have fabricated pentacene thin-film transistors (TFTs) with modified Al2O3 layers as gate dielectrics. The effects of thermal treatments on the E-beam-processed Al2O3 layers in the TFTs were investigated by using various analytical tools such as X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), atomic force microscope (AFM), and a contact angle method. From the results of the analyses, it was confirmed that the performance of thermally treated Al2O3 gate dielectrics is much better than that of non-treated ones. Finally, pentacene TFTs were fabricated with optimum conditions and improved electrical properties were obtained for low-voltage (below -3 V) TFTs as follows: a mobility of 0.9 cm(2) V-1 s(-1), a threshold voltage of -1.3 V, a sub-threshold slope of 0.12 V/decade, and an on/off current ratio of 2.2 x 10(5). (c) 2012 The Japan Society of Applied Physics | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | IOP PUBLISHING LTD | - |
dc.relation.isPartOf | JAPANESE JOURNAL OF APPLIED PHYSICS | - |
dc.subject | DEPOSITION | - |
dc.subject | MORPHOLOGY | - |
dc.subject | ROUGHNESS | - |
dc.subject | LAYER | - |
dc.title | Improved Performance of Pentacene Thin-Film Transistors with Al2O3 Gate Dielectric: Annealing Effect on the Surface Properties | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.description.journalClass | 1 | - |
dc.identifier.wosid | 000300627200061 | - |
dc.identifier.doi | 10.1143/JJAP.51.025702 | - |
dc.identifier.bibliographicCitation | JAPANESE JOURNAL OF APPLIED PHYSICS, v.51, no.2 | - |
dc.identifier.scopusid | 2-s2.0-84863145265 | - |
dc.citation.title | JAPANESE JOURNAL OF APPLIED PHYSICS | - |
dc.citation.volume | 51 | - |
dc.citation.number | 2 | - |
dc.contributor.affiliatedAuthor | Li, Zhao-Hui | - |
dc.contributor.affiliatedAuthor | Kwon, Sang Jik | - |
dc.contributor.affiliatedAuthor | Cho, Eou-Sik | - |
dc.type.docType | Article | - |
dc.subject.keywordPlus | DEPOSITION | - |
dc.subject.keywordPlus | MORPHOLOGY | - |
dc.subject.keywordPlus | ROUGHNESS | - |
dc.subject.keywordPlus | LAYER | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
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