Work function effects of ZnO thin film for acetone gas detection
- Authors
- Yoon, Young Soo; Jee, Seung Hyun; Kakati, Nitul; Maiti, Jatindranath; Kim, Dong-Joo; Lee, Seok Hee; Yoon, Hyon Hee
- Issue Date
- Jan-2012
- Publisher
- ELSEVIER SCI LTD
- Keywords
- Surfaces; Electrical properties; ZnO; Sensors
- Citation
- CERAMICS INTERNATIONAL, v.38, pp.S653 - S656
- Journal Title
- CERAMICS INTERNATIONAL
- Volume
- 38
- Start Page
- S653
- End Page
- S656
- URI
- https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/16659
- DOI
- 10.1016/j.ceramint.2011.05.128
- ISSN
- 0272-8842
- Abstract
- ZnO thin films were deposited on alumina substrates under various conditions and then plasma treated with the goal of fabricating ZnO sensors for acetone gas detection. The ZnO thin films were deposited using the radio frequency (RF) magnetron sputtering method with a RuO2 micro heater and Ru electrode. In order to control the work function of the sensor, ZnO thin films were deposited under the various deposition conditions (RF power, distance from target to substrate) and then plasma treated. The sensitivity of the ZnO sensors was measured in the air or in acetone gas (500 and 1500 ppm) at a substrate temperature of 250 degrees C, which was heated using a RuO2 micro-heater. The sensitivity of the ZnO sensors was dependent on the work function of the ZnO thin films. Moreover, the work function of the ZnO thin films was also dependent on the binding energy of oxygen atoms. The results of this study indicate that the work function of the as-deposited or plasma treated ZnO thin films were sufficient for these films to be used as a ZnO sensor for acetone gas detection. (C) 2011 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 공과대학 > 화공생명공학과 > 1. Journal Articles
- 공과대학 > 신소재공학과 > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/16659)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.