PPMgLN ridge waveguide fabrication with low optical scattering loss using dry-etch process
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kang, T.-Y. | - |
dc.contributor.author | Park, J.-H. | - |
dc.contributor.author | Lim, T.-H. | - |
dc.contributor.author | Lee, H.-Y. | - |
dc.contributor.author | Kim, K.-H. | - |
dc.date.available | 2020-02-29T09:44:53Z | - |
dc.date.created | 2020-02-11 | - |
dc.date.issued | 2012 | - |
dc.identifier.issn | 0000-0000 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/17478 | - |
dc.description.abstract | We fabricated QPM-SHG (quasi-Phase-Matched Second-Harmonic-Generation) ridge type waveguide using PPMgLN Dry-etch Fabricaion process. We measured sidewall Roughness of ridge waveguide using AFM. We calculated optical scattering Loss with sidewall roughness RMS and Ridge Waveguide structure inspection result. As a result of calculated loss, sidewall scattering roughness little contributes to the propagation loss. By using optimized period and NLD dry-etch Process, high conversion efficiency can be obtained by using a SHG device at room temperature. © 2012 IEEE. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.relation.isPartOf | Technical Digest - 2012 17th Opto-Electronics and Communications Conference, OECC 2012 | - |
dc.subject | AFM | - |
dc.subject | Dry-etch | - |
dc.subject | High conversion efficiency | - |
dc.subject | Optical scattering | - |
dc.subject | Propagation loss | - |
dc.subject | Quasi-phase-matched | - |
dc.subject | Ridge waveguide structures | - |
dc.subject | Ridge-type waveguides | - |
dc.subject | Room temperature | - |
dc.subject | Sidewall roughness | - |
dc.subject | Waveguide fabrication | - |
dc.subject | Light scattering | - |
dc.subject | Optical waveguides | - |
dc.subject | Waveguides | - |
dc.subject | Ridge waveguides | - |
dc.title | PPMgLN ridge waveguide fabrication with low optical scattering loss using dry-etch process | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.description.journalClass | 1 | - |
dc.identifier.doi | 10.1109/OECC.2012.6276774 | - |
dc.identifier.bibliographicCitation | Technical Digest - 2012 17th Opto-Electronics and Communications Conference, OECC 2012, pp.651 - 652 | - |
dc.identifier.scopusid | 2-s2.0-84867594112 | - |
dc.citation.endPage | 652 | - |
dc.citation.startPage | 651 | - |
dc.citation.title | Technical Digest - 2012 17th Opto-Electronics and Communications Conference, OECC 2012 | - |
dc.contributor.affiliatedAuthor | Kang, T.-Y. | - |
dc.type.docType | Conference Paper | - |
dc.subject.keywordPlus | AFM | - |
dc.subject.keywordPlus | Dry-etch | - |
dc.subject.keywordPlus | High conversion efficiency | - |
dc.subject.keywordPlus | Optical scattering | - |
dc.subject.keywordPlus | Propagation loss | - |
dc.subject.keywordPlus | Quasi-phase-matched | - |
dc.subject.keywordPlus | Ridge waveguide structures | - |
dc.subject.keywordPlus | Ridge-type waveguides | - |
dc.subject.keywordPlus | Room temperature | - |
dc.subject.keywordPlus | Sidewall roughness | - |
dc.subject.keywordPlus | Waveguide fabrication | - |
dc.subject.keywordPlus | Light scattering | - |
dc.subject.keywordPlus | Optical waveguides | - |
dc.subject.keywordPlus | Waveguides | - |
dc.subject.keywordPlus | Ridge waveguides | - |
dc.description.journalRegisteredClass | scopus | - |
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