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Preparation of multi-component thin film by facing target sputtering system
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김경환 | - |
| dc.date.available | 2020-04-24T12:46:25Z | - |
| dc.date.issued | 2010-08-20 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/31754 | - |
| dc.title | Preparation of multi-component thin film by facing target sputtering system | - |
| dc.title.alternative | Preparation of multi-component thin film by facing target sputtering system | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 제39회 한국진공학회 하계정기학술대회 | - |
| dc.citation.conferencePlace | 대한민국 | - |
| dc.citation.conferencePlace | 무창포 비체팰리스 | - |
| dc.citation.endPage | 252 | - |
| dc.citation.startPage | 252 | - |
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Collections - IT융합대학 > 전기공학과 > 2. Conference Papers
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Related Researcher
- Kim, Kyung Hwan
- College of IT Convergence (Department of Electrical Engineering)