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Self-annealing effect of ion implanted amorphous carbon films by MPCVDSelf-annealing effect of ion implanted amorphous carbon films by MPCVD
- Alternative Title
- Self-annealing effect of ion implanted amorphous carbon films by MPCVD
- Authors
- 권상직
- Issue Date
- 11-Sep-2008
- Place
- 스페인
SITGES, SPAIN
- metadata.conference.dc.citation.conferenceName
- The 19th European Conference on Diamond, Diamond-Like Meterials, Carbon Nanotubes and Nitrides
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Collections - IT융합대학 > 전자공학과 > 2. Conference Papers
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