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Self-annealing effect of ion implanted amorphous carbon films by MPCVD
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 조의식 | - |
| dc.date.available | 2020-04-24T18:41:59Z | - |
| dc.date.issued | 2008-09-11 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/35176 | - |
| dc.title | Self-annealing effect of ion implanted amorphous carbon films by MPCVD | - |
| dc.title.alternative | Self-annealing effect of ion implanted amorphous carbon films by MPCVD | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 19th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides | - |
| dc.citation.conferencePlace | 스페인 | - |
| dc.citation.conferencePlace | Sitges, Spain | - |
| dc.citation.endPage | P.2.8.9 | - |
| dc.citation.startPage | P.2.8.9 | - |
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