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대향타겟식 스퍼터링 방법을 이용한 IZTO박막의 제작

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dc.contributor.author김경환-
dc.date.available2020-04-24T19:40:33Z-
dc.date.issued2008-02-15-
dc.identifier.urihttps://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/35630-
dc.title대향타겟식 스퍼터링 방법을 이용한 IZTO박막의 제작-
dc.typeConference-
dc.citation.conferenceName한국진공학회 동계학술대회-
dc.citation.conferencePlaceSouth Korea-
dc.citation.conferencePlace단국대학교-
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IT융합대학 > 전기공학과 > 2. Conference Papers

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