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Mechanism for nitrogen-originated negative bias temperature instability (NBTI) in Si oxynitrideMechanism for nitrogen-originated negative bias temperature instability (NBTI) in Si oxynitride
- Alternative Title
- Mechanism for nitrogen-originated negative bias temperature instability (NBTI) in Si oxynitride
- Authors
- 이은철
- Issue Date
- 14-Dec-2007
- Place
- South Korea
jeju, Korea
- metadata.conference.dc.citation.conferenceName
- The 5th International Conference on Advanced Materials and Devices
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Collections - 바이오나노대학 > 나노물리학과 > 2. Conference Papers
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Related Researcher
- Lee, Eun Cheol
- BioNano Technology (Department of Physics)