Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Fabrication of Sputtered Mo Gated Silicon Field Emitter Arrays by using the Condition of Silicon Dry EtchFabrication of Sputtered Mo Gated Silicon Field Emitter Arrays by using the Condition of Silicon Dry Etch
- Alternative Title
- Fabrication of Sputtered Mo Gated Silicon Field Emitter Arrays by using the Condition of Silicon Dry Etch
- Authors
- 권상직
- Issue Date
- 14-Nov-2007
- Place
- 일본
Tokyo, Japan
- metadata.conference.dc.citation.conferenceName
- 2007 Dry Process International Symposium
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - IT융합대학 > 전자공학과 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.