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리니어모터 스테이지 롤오차 보상장치 제어Control of Roll Error Compensation System for Linear Motor Stage

Alternative Title
Control of Roll Error Compensation System for Linear Motor Stage
Authors
강민식
Issue Date
10-Nov-2007
URI
https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/35811
Place
South Korea
광주과학기술원
metadata.conference.dc.citation.conferenceName
한국정밀공학회 추계학술대회
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공과대학 > 기계공학과 > 2. Conference Papers

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Kang, Min Sig
Engineering (기계·스마트·산업공학부(기계공학전공))
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