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Al 박막의 Ar 플라즈마 표면처리에 따른 특성The Characteristics of Al Thin Films on Ar Plasma Surface Treatment
- Alternative Title
- The Characteristics of Al Thin Films on Ar Plasma Surface Treatment
- Authors
- 이능헌
- Issue Date
- 20-Jul-2007
- Place
- South Korea
강원도 평창군 용평리조트
- metadata.conference.dc.citation.conferenceName
- 2007년 대한전기학회 제38회 하계학술대회
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