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Preparation of ITO thin film on flexible polymer substrate by using facing targets sputtering method

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dc.contributor.author김경환-
dc.date.available2020-04-24T23:37:33Z-
dc.date.issued2006-10-21-
dc.identifier.urihttps://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/36678-
dc.titlePreparation of ITO thin film on flexible polymer substrate by using facing targets sputtering method-
dc.title.alternativePreparation of ITO thin film on flexible polymer substrate by using facing targets sputtering method-
dc.typeConference-
dc.citation.conferenceNameThe 6th Korea-Japan Symposium on Plasma and Thin Film Technology-
dc.citation.conferencePlaceSouth Korea-
dc.citation.conferencePlace해운대그랜드호텔,부산-
dc.citation.endPage59-
dc.citation.startPage59-
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