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Fabrication of ZnO, electrode, and reflector thin films by magnetron sputtering for Film Bulk Acoustic Resonator
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 신영화 | - |
| dc.date.available | 2020-04-25T02:38:20Z | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/37650 | - |
| dc.title | Fabrication of ZnO, electrode, and reflector thin films by magnetron sputtering for Film Bulk Acoustic Resonator | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | Joint International Plasma Symposium of 6th APCPST,15th SPSM,OS 2002&11th KAPRA | - |
| dc.citation.conferencePlace | South Korea | - |
| dc.citation.title | Joint International Plasma Symposium of 6th APCPST,15th SPSM,OS 2002&11th KAPRA | - |
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