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Fabrication of ZnO, electrode, and reflector thin films by magnetron sputtering for Film Bulk Acoustic Resonator
- Authors
- 신영화
- Conference Name
- Joint International Plasma Symposium of 6th APCPST,15th SPSM,OS 2002&11th KAPRA
- Place
- South Korea
- metadata.conference.dc.citation.conferenceName
- Joint International Plasma Symposium of 6th APCPST,15th SPSM,OS 2002&11th KAPRA
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