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The Effect of Post Annealing in Oxygen Ambienton Characteristics of Al-Doped ZnO Films for Film Bulk Acoustic Resonator(FBAR)

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dc.contributor.author김종성-
dc.date.available2020-04-25T02:41:05Z-
dc.identifier.urihttps://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/37816-
dc.titleThe Effect of Post Annealing in Oxygen Ambienton Characteristics of Al-Doped ZnO Films for Film Bulk Acoustic Resonator(FBAR)-
dc.typeConference-
dc.citation.conferenceName9th APCChE Congress and CHEMECA 2002-
dc.citation.conferencePlace뉴질랜드-
dc.citation.endPage104-
dc.citation.startPage104-
dc.citation.title9th APCChE Congress and CHEMECA 2002-
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