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The Effect of Post Annealing in Oxygen Ambienton Characteristics of Al-Doped ZnO Films for Film Bulk Acoustic Resonator(FBAR)

Authors
김종성
URI
https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/37816
Conference Name
9th APCChE Congress and CHEMECA 2002
Place
뉴질랜드
metadata.conference.dc.citation.conferenceName
9th APCChE Congress and CHEMECA 2002
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공과대학 > 화공생명공학과 > 2. Conference Papers

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