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Effects of Amorphous Si underlayer to CoCrTa/Si thin film prepared by Facing Targets sputtering system

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dc.contributor.author김경환-
dc.date.available2020-04-25T03:37:14Z-
dc.identifier.urihttps://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/37891-
dc.titleEffects of Amorphous Si underlayer to CoCrTa/Si thin film prepared by Facing Targets sputtering system-
dc.typeConference-
dc.citation.conferenceNameThe International Conference on Electrical Engineering 2002-
dc.citation.conferencePlaceSouth Korea-
dc.citation.endPage1225-
dc.citation.startPage1222-
dc.citation.titleICEE 2002 Proceeding-
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IT융합대학 > 전기공학과 > 2. Conference Papers

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College of IT Convergence (Department of Electrical Engineering)
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