Characteristics of Phosphorus lmplanted Mold Type Diamond FEAs
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 권상직 | - |
dc.date.available | 2020-04-25T03:37:31Z | - |
dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/37909 | - |
dc.title | Characteristics of Phosphorus lmplanted Mold Type Diamond FEAs | - |
dc.type | Conference | - |
dc.citation.conferenceName | 6th APCPST(Asia Pacific Conference on Plasma Science and Technology) | - |
dc.citation.conferencePlace | 대한민국 | - |
dc.citation.endPage | 412 | - |
dc.citation.startPage | 412 | - |
dc.citation.title | Joint International Plasma Symposium of 6th APCPST, 15th SPSM, OS 2002 & 11th KAPRA | - |
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