대향타겟식 스퍼터법에 의한 ZnO:Al 박막의 제작
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김경환 | - |
dc.date.available | 2020-04-25T05:36:30Z | - |
dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/38466 | - |
dc.title | 대향타겟식 스퍼터법에 의한 ZnO:Al 박막의 제작 | - |
dc.type | Conference | - |
dc.citation.conferenceName | 한국진공학회 | - |
dc.citation.conferencePlace | South Korea | - |
dc.citation.endPage | 64 | - |
dc.citation.startPage | 64 | - |
dc.citation.title | 한국진공학회 제20회 학술발표회 | - |
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