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CoCrTa/Ti 이층막의 하지층 기판온도의존성 및 특성개선
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김경환 | - |
| dc.date.available | 2020-04-25T05:37:55Z | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/38553 | - |
| dc.title | CoCrTa/Ti 이층막의 하지층 기판온도의존성 및 특성개선 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국전기전자재료학회 | - |
| dc.citation.conferencePlace | 대한민국 | - |
| dc.citation.endPage | 495 | - |
| dc.citation.startPage | 492 | - |
| dc.citation.title | 한국전기전자재료학회 2000년도 추계학술대회 논문집 | - |
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Collections - IT융합대학 > 전기공학과 > 2. Conference Papers
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Related Researcher
- Kim, Kyung Hwan
- College of IT Convergence (Department of Electrical Engineering)