스퍼터링법에 의한 Pt 박막증착 및 온도센서 제조에 관한 연구
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김종성 | - |
dc.date.available | 2020-04-25T06:40:55Z | - |
dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/39041 | - |
dc.title | 스퍼터링법에 의한 Pt 박막증착 및 온도센서 제조에 관한 연구 | - |
dc.type | Conference | - |
dc.citation.conferenceName | 한국공업화학학회 추계학술대회 | - |
dc.citation.conferencePlace | 대한민국 | - |
dc.citation.endPage | . | - |
dc.citation.startPage | . | - |
dc.citation.title | 한국공업화학학회 추계학술대회 | - |
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