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스퍼터링법에 의한 Pt 박막증착 및 온도센서 제조에 관한 연구

Authors
김종성
URI
https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/39041
Conference Name
한국공업화학학회 추계학술대회
Place
대한민국
metadata.conference.dc.citation.conferenceName
한국공업화학학회 추계학술대회
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공과대학 > 화공생명공학과 > 2. Conference Papers

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