MPCVD를 이용한 다결정 다이아몬드 박막의 증착 및 물성 분석
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 권상직 | - |
dc.date.available | 2020-04-25T08:40:25Z | - |
dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/39627 | - |
dc.title | MPCVD를 이용한 다결정 다이아몬드 박막의 증착 및 물성 분석 | - |
dc.type | Conference | - |
dc.citation.conferenceName | 대한 전기 공학회 | - |
dc.citation.conferencePlace | 대한민국 | - |
dc.citation.endPage | 1332 | - |
dc.citation.startPage | 1330 | - |
dc.citation.title | Summer Annual Conference '98(D) | - |
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