Annealing Dependence of Negative Bias Temperature Instability (NBTI) in 4H-SiC MOSFETs
DC Field | Value | Language |
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dc.contributor.author | Koo, Sang-Mo | - |
dc.contributor.author | Jung, Se-Woong | - |
dc.contributor.author | Moon, Kyoung-Sook | - |
dc.contributor.author | Lee, Sang-Kwon | - |
dc.contributor.author | Kim, So-Mang | - |
dc.date.available | 2020-02-27T16:44:36Z | - |
dc.date.created | 2020-02-06 | - |
dc.date.issued | 2017-10 | - |
dc.identifier.issn | 1555-130X | - |
dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/5628 | - |
dc.description.abstract | In this work, we report on the improvement of negative bias temperature instability (NBTI) in 4H-SiC MOS-FETs by annealing process in NO (Device B), compared to in N2O (Device A). The V-th shift and interface properties of SiC MOSFETs under negative bias stress were investigated. The Device A and B have Delta V-th values of 0.51 V and 0.09 V, respectively. From the time dependences, we applied a two component model that considers nitrogen(N)-related traps. The relatively small value of Delta V-th is indicative of the decrease in the oxide traps and activation of nitrogen-related traps. The N-it of the Device B was decreased about 17 times compared to Device A. These results indicate to the reduction of the N-related defects into the oxide network. Controlling of nitrogen in SiO2 is important for the long-term V-th stability of SiC-MOSFETs under NBT stress. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | AMER SCIENTIFIC PUBLISHERS | - |
dc.relation.isPartOf | JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS | - |
dc.subject | SILICON-CARBIDE | - |
dc.subject | SIC MOSFETS | - |
dc.subject | TRANSISTORS | - |
dc.subject | INTERFACE | - |
dc.subject | STABILITY | - |
dc.title | Annealing Dependence of Negative Bias Temperature Instability (NBTI) in 4H-SiC MOSFETs | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.description.journalClass | 1 | - |
dc.identifier.wosid | 000419957000022 | - |
dc.identifier.doi | 10.1166/jno.2017.2178 | - |
dc.identifier.bibliographicCitation | JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS, v.12, no.10, pp.1167 - 1171 | - |
dc.identifier.scopusid | 2-s2.0-85041135661 | - |
dc.citation.endPage | 1171 | - |
dc.citation.startPage | 1167 | - |
dc.citation.title | JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS | - |
dc.citation.volume | 12 | - |
dc.citation.number | 10 | - |
dc.contributor.affiliatedAuthor | Moon, Kyoung-Sook | - |
dc.type.docType | Article | - |
dc.subject.keywordAuthor | 4H-SiC MOSFET | - |
dc.subject.keywordAuthor | NBTI | - |
dc.subject.keywordAuthor | Trapping | - |
dc.subject.keywordAuthor | Threshold Voltage | - |
dc.subject.keywordAuthor | Oxide Charge | - |
dc.subject.keywordPlus | SILICON-CARBIDE | - |
dc.subject.keywordPlus | SIC MOSFETS | - |
dc.subject.keywordPlus | TRANSISTORS | - |
dc.subject.keywordPlus | INTERFACE | - |
dc.subject.keywordPlus | STABILITY | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
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