Comparative Study of Crystallographic and Electrical Properties of Zinc Oxide Films Fabricated by Dry and Wet Processes

Abstract

Transparent conductive ZnO film has been used in electronic applications as a transparent electrode, and it has been fabricated by using various deposition methods such as sputtering, and solution process. Each method has its own merits for the fabrication of transparent conductive ZnO films; however, the details of a comparative study between the sputtering method and solution process have not yet been reported. In this study, we fabricated transparent conductive ZnO films using the facing targets sputtering system and an aqueous solution process named the spin-spray method, and compared the structural, optical and electrical properties of the fabricated films.