A study of Physically Implanted Surface Islands by direct Nd:YAG Laser Beam Irradiation
- Authors
- Oh, Chang-Heon; Cheon, Suyoung; Lim, Changjin; Lee, Jeongjun; Jeon, Jihyun; Kim, Kyoung-Kook; Chung, Chan-Moon; Cho, Soohaeng
- Issue Date
- Jul-2017
- Publisher
- KOREAN VACUUM SOC
- Keywords
- ND:YAG LASER; IMPLANT; AZO; Nano Carbon tube; alpha-Fe2O3
- Citation
- APPLIED SCIENCE AND CONVERGENCE TECHNOLOGY, v.26, no.4, pp.66 - 69
- Journal Title
- APPLIED SCIENCE AND CONVERGENCE TECHNOLOGY
- Volume
- 26
- Number
- 4
- Start Page
- 66
- End Page
- 69
- URI
- https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/5997
- DOI
- 10.5757/ASCT.2017.26.4.66
- ISSN
- 2288-6559
- Abstract
- Physically implanted surface islands of Nano Carbon Tube (NCT) and alpha-Fe2O3 particles have been produced on Al-doped ZnO (AZO)/glass surfaces by simple and direct ND:YAG laser beam irradiation. Sheet resistance of the reconstructed surface increased by about 3.6% of over AZO. Minimal surface damage can be repaired by ND: YAG laser beam irradiation in conjunction with proper impurities. Implanted islands of NCT, which are considered to be a good conductive impurity, on AZO increased the sheet resistance by about 1.8%, while implanted islands of alpha-Fe2O3, an insulating impurity, on AZO increased sheet resistance by about 129% compared with a laser beam treated AZO. This study provides insight regarding surface implantations of nanowires and micro-circuits, doping effects for semiconductors and optical devices, surface area and impurity effects for catalysis.
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 바이오나노대학 > 나노물리학과 > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/5997)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.