Hidayat, Romel; Khumaini, Khabib; Kim, Hye-Lee; Chowdhury, Tanzia; Mayangsari, Tirta Rona; Cho, Seongjae; Cho, Byungchul; Park, Sangjoon; Jung, Jongwan; Lee, Won-Jun
ArticleIssue Date2023CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.41, no.3PublisherA V S AMER INST PHYSICS