FTS 장치를 이용한 다양한 공정 조건에서 제작한 ITO 박막의 특성 분석
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김상모 | - |
dc.contributor.author | 금민종 | - |
dc.contributor.author | 김경환 | - |
dc.date.available | 2020-02-27T22:41:17Z | - |
dc.date.created | 2020-02-12 | - |
dc.date.issued | 2017 | - |
dc.identifier.issn | 1738-2270 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/7173 | - |
dc.description.abstract | ITO thin films were grown on the glass substrate under various oxygen gas flow and substrate temperature by using FTS (Facing Target Sputtering) system. To investigate properties of as-prepared films for transparent electrical devices, we employed four-point probe, UV-VIS spectrometer, X-ray diffractometer (XRD), scanning electron microscopy (SEM), Hall Effect measurement system and Atomic Force Microscope (AFM). As a results, all of prepared samples has high transmittance of over 80 % in the visible range (300-800 nm). Their resistivity increased as a function of oxygen gas flow and substrate temperature due to their crystal structure and oxygen defect in the films. As-prepared films have a resistivity of under 10-4 (Ω-cm). | - |
dc.language | 한국어 | - |
dc.language.iso | ko | - |
dc.publisher | 한국반도체디스플레이기술학회 | - |
dc.relation.isPartOf | 반도체디스플레이기술학회지 | - |
dc.title | FTS 장치를 이용한 다양한 공정 조건에서 제작한 ITO 박막의 특성 분석 | - |
dc.title.alternative | Characteristics of ITO thin films grown under various process condition by using facing target sputtering (FTS) system | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.description.journalClass | 2 | - |
dc.identifier.bibliographicCitation | 반도체디스플레이기술학회지, v.16, no.1, pp.112 - 115 | - |
dc.identifier.kciid | ART002214935 | - |
dc.citation.endPage | 115 | - |
dc.citation.startPage | 112 | - |
dc.citation.title | 반도체디스플레이기술학회지 | - |
dc.citation.volume | 16 | - |
dc.citation.number | 1 | - |
dc.contributor.affiliatedAuthor | 김상모 | - |
dc.contributor.affiliatedAuthor | 김경환 | - |
dc.subject.keywordAuthor | FTS | - |
dc.subject.keywordAuthor | ITO | - |
dc.subject.keywordAuthor | oxygen | - |
dc.subject.keywordAuthor | substrate temperature | - |
dc.description.journalRegisteredClass | kci | - |
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