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PECVD 이용한 비정질 실리콘형 마이크로 볼로미터 특성
강태영;
김경환
Article
Issue Date
2012
Citation
반도체디스플레이기술학회지, v.11, no.4, pp.19 - 23
Publisher
한국반도체디스플레이기술학회
대향 타겟 스퍼터링법으로 제작한 SiC SBD의 전기적 특성
이진선; 강태영;
김경환
Article
Issue Date
2015
Citation
반도체디스플레이기술학회지, v.14, no.1, pp.27 - 30
Publisher
한국반도체디스플레이기술학회
1
Discover
Author
Kim, Kyung Hwan
2
이진선
1
Subject
Amorphous silicon
1
Detectivity
1
Facing Targets sputtering
1
Infrared
1
Microbolometer
1
PECVD
1
Schottky barrier diode
1
Schottky diode parameter
1
Silicon carbide
1
TCR
1
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