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Effect of dopants and thermal treatment on properties of Ga-Al-ZnO thin films fabricated by hetero targets sputtering system
Hong, JeongSoo; Matsushita, Nobuhiro;
Kim, KyungHwan
Article
Issue Date
2013
Citation
THIN SOLID FILMS, v.531, pp.238 - 242
Publisher
ELSEVIER SCIENCE SA
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Kim, Kyung Hwan
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Matsushita, Nobuhiro
1
Subject
Aluminum-doped zinc oxide
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DEPOSITION
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Facing target sputtering
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Gallium-doped zinc oxide
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GLASS
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LOW-TEMPERATURE
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Optical properties
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SPRAY-PYROLYSIS
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Thermal treatment
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X-ray diffraction
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Date Issued
2013
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English
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Thin Solid Films
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