Focused Ion Beam-Based Fabrication and Electrical Impedance Characterization of Sub-Micropore Membrane
- Authors
- Kim, Yuntae; Choi, Yoon; Jeon, Minseok; Min, Junhong; Cho, Sungbo
- Issue Date
- Nov-2016
- Publisher
- AMER SCIENTIFIC PUBLISHERS
- Keywords
- Hole; Impedance Spectroscopy; MEMS; Silicon Nitride; Single Cell
- Citation
- JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.16, no.11, pp.11928 - 11932
- Journal Title
- JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
- Volume
- 16
- Number
- 11
- Start Page
- 11928
- End Page
- 11932
- URI
- https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/7733
- DOI
- 10.1166/jnn.2016.13619
- ISSN
- 1533-4880
- Abstract
- Pore membranes have been used to entrap molecules, e.g., DNA, viruses, and proteins, and to mimic the lipid membrane of cells for studying various biological phenomena. In this work, sub-micropore membranes were fabricated by silicon processing along with the focused ion beam (FIB) technique and the electrical impedance of the fabricated pore membranes was characterized. Through scanning electron microscopy, the fabricated pore was found to have a diameter of 500 nm and thickness of 500 nm. Electrical impedance measurements of the pore membrane and cells revealed an increase in the impedance magnitude at low frequencies according to the positioning of single cells on the pore. Further, the measured impedance value of the pore membrane was found to be dependent on the type of cell positioned on the pore.
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - IT융합대학 > 전자공학과 > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/7733)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.