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Double sided solvent-imprint lithography (DSSIL) on glassy thermoplastic luminescent surfaces using a soft stamp

Authors
Wu, Si-YingHulme, John P.
Issue Date
1-Oct-2016
Publisher
ELSEVIER SCIENCE BV
Keywords
Double-sided; Solvent; Nano-imprint; Luminescence; Substrate; PDMS
Citation
MICROELECTRONIC ENGINEERING, v.164, pp.93 - 99
Journal Title
MICROELECTRONIC ENGINEERING
Volume
164
Start Page
93
End Page
99
URI
https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/7802
DOI
10.1016/j.mee.2016.07.015
ISSN
0167-9317
Abstract
DSSIL was used in combination with inexpensive injection molded glassy polystyrene surfaces doped with an organic light emitting polymer to generate a series of planar light emitting diffractive optical elements. 2D diffractive structures with lateral and vertical features ranging from 1 to 0.5 mu m and 30-125 nm were fabricated on glassy polystyrene surfaces using soft 1D PDMS gratings via multi step solvent imprint lithography (MSSIL). The scattering and transmission efficiencies of DSSIL PS surfaces and MSSIL PS surfaces were measured. Illumination (531 nm laser) of the DSSIL imprinted surface exhibited a 5% and a 4 fold increase in normal transmission and scattering efficiencies compared to PS surfaces imprinted on one side alone. The angular emission and distribution of patterned PS surfaces doped with a light emitting polymer were studied as well as the characteristics of the substrate and the effect of solvent polarity on luminescence quenching. The results show that MSSIL and DSSIL are facile, inexpensive techniques highly suitable for the routine fabrication of novel symmetric and asymmetric diffractive structures in an interdisciplinary laboratory. (C) 2016 Elsevier B.V. All rights reserved.
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Hulme, John P.
BioNano Technology (Department of BioNano Technology)
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